Transaction Description:
PURPOSE: DURING PHASE II, XALLENT PLANS TO DEVELOP AN INNOVATIVE HYBRID METROLOGY SYSTEM TO USE FOR IMAGING AND ELECTRICAL CHARACTERIZATION OF THIN FILM MATERIALS AND SEMICONDUCTOR DEVICES.ACTIVITIES TO BE PERFORMED: DURING PHASE II, XALLENT PROPOSES TO DEVELOP AND COMMERCIALIZE AN ATOMIC FORCE MICROSCOPE (AFM) PLATFORM THAT LEVERAGES AN INNOVATIVE AFM PROBE WITH INTEGRATED 4-POINT PROBES TO ALLOW FOR ATOMIC IMAGING AND SHEET RESISTANCE CHARACTERIZATION OF THIN FILMS AND SEMICONDUCTOR DEVICES.EXPECTED OUTCOMES: XALLENT'S MULTIPLE TIPS AFM PROBE WILL ALLOW RESEARCHERS TO SEQUENTIALLY PERFORM AFM AND 4-POINT PROBING, WHICH IS CURRENTLY NOT POSSIBLE ON EXISTING SINGLE TIP AFM TOOLS.INTENDED BENEFICIARIES: SEMICONDUCTOR FOUNDRIES, INTEGRATED DEVICE MANUFACTURERS, FABLESS SEMICONDUCTOR COMPANIES, GOVERNMENT/R&D CENTERS, INDUSTRY SUBCONTRACTORS, AND RESEARCH UNIVERSITIES.SUBRECIPIENT ACTIVITIES: THE RECIPIENT DOES NOT INTEND TO SUB AWARD FUNDS.